Thermal stability of Mo/Si multilayer soft-X-ray mirrors fabricated by electron-beam evaporation

✍ Scribed by H. -J. Stock; U. Kleineberg; B. Heidemann; K. Hilgers; A. Kloidt; B. Schmiedeskamp; U. Heinzmann; M. Krumrey; P. Müller; F. Scholze

• Publisher: Springer
• Year: 1994
• Tongue: English
• Weight: 569 KB
• Volume: 58
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/bf00323612