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Electron-Beam Chemical Lithography with Aliphatic Self-Assembled Monolayers

✍ Scribed by Nirmalya Ballav; Soeren Schilp; Michael Zharnikov

Publisher: John Wiley and Sons
Year: 2008
Tongue: English
Weight: 504 KB
Volume: 47
Category: Article
ISSN: 0044-8249
DOI: 10.1002/anie.200704105

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