Electron and Ion Densities Measurement in Reactive Magnetron Zinc Sputtering Plasma

✍ Scribed by Nafarizal, Nayan; Sahdan, M.Z.; Ali, Riyaz Ahmad Mohamad; Amira, Sharifah; Omar, Salwa; Mamat, Mohamad Hafiz; Rusop, Mohammad; Hashim, Uda; Rusop Mahmood, Mohamad

• Book ID: 121863135
• Publisher: Trans Tech Publications, Ltd.
• Year: 2013
• Tongue: English
• Weight: 326 KB
• Volume: 832
• Category: Article
• ISSN: 1662-8958
• DOI: 10.4028/www.scientific.net/AMR.832.344