✦ LIBER ✦
On the argon and oxygen incorporation into SiOx through ion implantation during reactive plasma magnetron sputter deposition
✍ Scribed by E.D. van Hattum; D.B. Boltje; A. Palmero; W.M. Arnoldbik; H. Rudolph; F.H.P.M. Habraken
- Book ID
- 103819626
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 198 KB
- Volume
- 255
- Category
- Article
- ISSN
- 0169-4332
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