Electrochemical capacitance-voltage characterization of plasma-doped ultra-shallow junctions

✍ Scribed by Huizhen Wu; Guoping Ru; Yonggang Zhang; Chengguo Jin; Bunji Mizuno; Yulong Jiang; Xinping Qu; Bingzong Li

• Book ID: 107374168
• Publisher: SP Higher Education Press
• Year: 2008
• Tongue: English
• Weight: 99 KB
• Volume: 3
• Category: Article
• ISSN: 1673-3584
• DOI: 10.1007/s11460-008-0016-4