Major scaling issues, which need to be addressed to continue scaling according to Moore's law, include increase of 2 transistor leakage due to use of thin gate oxide (about 1 nm limit for SiO ), power (reaching 100 W/ cm ) and RC delay 2 (dielectric constant limit is 1 for air and Cu resistivity inc
β¦ LIBER β¦
Electrochemical aspects of corrosion resistance and etching of metallizations for microelectronics
β Scribed by R.B. Comizzoli; R.P. Frankenthal; K.J. Hanson; K. Konstadinidis; R.L. Opila; J. Sapjeta; J.D. Sinclair; K.M. Takahashi; A.L. Frank; A.O. Ibidunni
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 738 KB
- Volume
- 198
- Category
- Article
- ISSN
- 0921-5093
No coin nor oath required. For personal study only.
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