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Electrical Properties of TiNx Films on p-silicon Substrates Obtained by Reactive Ion Beam Assisted Deposition Technique

โœ Scribed by A. M. Narsale; Yousuf Pyar Ali; D. C. Kothari; L. Guzman; A. Miotello


Book ID
110238539
Publisher
Springer
Year
1998
Tongue
English
Weight
83 KB
Volume
17
Category
Article
ISSN
0261-8028

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