𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Electrical properties of thin Co2Si, CoSi, and CoSi2layers grown on evaporated silicon

✍ Scribed by C. -D. Lien; M. Finetti; M-A. Nicolet; S. S. Lau


Book ID
112817119
Publisher
Springer US
Year
1984
Tongue
English
Weight
651 KB
Volume
13
Category
Article
ISSN
0361-5235

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES


Thin films of CoSi2 on Si1βˆ’yCy substrate
✍ S. Teichert; M. Falke; H. Giesler; D.K. Sarkar; G. Beddies; H.-J. Hinneberg; G. πŸ“‚ Article πŸ“… 2000 πŸ› Elsevier Science 🌐 English βš– 58 KB

The reaction of Co with epitaxial Si C (001) films is investigated with regard to dependence on annealing temperature 12y y and C concentration y. Resistance measurements and RBS analysis reveal a small increase in the disilicide formation temperature. The electrical properties are very similar for