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Electrical and structural properties of buried CoSi2 layers in Si(100) grown by molecular beam allotaxy

✍ Scribed by M. Dolle; U. Gassig; H.L. Bay; A. Schüppen; S. Mantl

Book ID: 107864513
Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 419 KB
Volume: 253
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(94)90371-9

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