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Electrical properties of Ta-doped SnO[sub 2] thin films prepared by the metalâorganic chemical-vapor deposition method

✍ Scribed by Lee, Sang woo; Kim, Young-Woon; Chen, Haydn

Book ID: 121183212
Publisher: American Institute of Physics
Year: 2001
Tongue: English
Weight: 552 KB
Volume: 78
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.1337640

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Electrical properties of Ta-doped SnO[sub 2] thin films prepared by the metalâorganic chemical-vapor deposition method

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