Electrical properties of silicon layers implanted with erbium and oxygen ions in a wide dose range and thermally treated in different temperature conditions

✍ Scribed by O. V. Aleksandrov; A. O. Zakhar’in; N. A. Sobolev; Yu. A. Nikolaev

• Book ID: 110129625
• Publisher: Springer
• Year: 2002
• Tongue: English
• Weight: 60 KB
• Volume: 36
• Category: Article
• ISSN: 1063-7826
• DOI: 10.1134/1.1461417