Electrical properties of Ru and RuO2gate electrodes for Si-PMOSFET with ZrO2and Zr-silicate dielectrics

✍ Scribed by Huicai Zhong; Greg Heuss; You-Seok Suh; Veena Misra; Shin-Nam Hong

• Book ID: 107452677
• Publisher: Springer US
• Year: 2001
• Tongue: English
• Weight: 307 KB
• Volume: 30
• Category: Article
• ISSN: 0361-5235
• DOI: 10.1007/s11664-001-0164-2