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Electrical properties of boron- and phosphorous-doped microcrystalline silicon thin films prepared by magnetron sputtering of heavily doped silicon targets

✍ Scribed by Weiyan Wang, Jinhua Huang, Wei Xu…


Book ID
120681463
Publisher
Springer US
Year
2013
Tongue
English
Weight
569 KB
Volume
24
Category
Article
ISSN
0957-4522

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