Electrical Probe Diagnostics of the Hollow Cathode Plasma Jet System for Deposition of TiOx Thin Films

✍ Scribed by P. Virostko; Z. Hubička; M. Čada; P. Adámek; Š. Kment; M. Tichý; L. Jastrabík

• Publisher: John Wiley and Sons
• Year: 2008
• Tongue: English
• Weight: 511 KB
• Volume: 48
• Category: Article
• ISSN: 0005-8025
• DOI: 10.1002/ctpp.200810085