✦ LIBER ✦
A new kind of cathodic arc plasma PVD system with column target for the deposition of TiN film and other metallic films
✍ Scribed by Liu Weiyi; Li Yumin; Cui Zhanjun; He Tianxi
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 123 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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