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Tetrode sputtering system and its application for the deposition of tantalum, silica, and alumina thin films: T Asamaki, Z Oda, H Muta, T Mizonobe, Nippon Electric Co, Kawasaki, Japan


Publisher
Elsevier Science
Year
1968
Tongue
English
Weight
112 KB
Volume
18
Category
Article
ISSN
0042-207X

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