Tetrode sputtering system—its performance and applications for the deposition of tantalum, silica and alumina thin films : Zenjiro Oda, Tatsuo Asamaki, Hiroki Muta and Takao Mizonobe. NEC Res. Dev. Japan, No. 10, October (1967), p. 10

• Publisher: Elsevier Science
• Year: 1969
• Tongue: English
• Weight: 109 KB
• Volume: 8
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(69)90153-x