𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Electrical Modeling and Design of a Wafer-Level Package for MEM Resonators

✍ Scribed by Perruisseau-Carrier, J.; Mazza, M.; Jourdain, A.; Skrivervik, A.K.; Ionescu, A.M.; Tilmans, H.A.C.

Book ID
118697360
Publisher
IEEE
Year
2010
Tongue
English
Weight
800 KB
Volume
33
Category
Article
ISSN
1521-3323

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Design, fabrication and testing of a nov
Design, fabrication and testing of a novel MEMS resonator for mass sensing applications
✍ Zachary J. Davis; Winnie Svendsen; Anja Boisen πŸ“‚ Article πŸ“… 2007 πŸ› Elsevier Science 🌐 English βš– 624 KB

Micro-and nanoelectromechanical systems (MEMS/NEMS) have a high potential for mass sensing application. By miniaturization of the dimensions, higher and higher sensitivities can be achieved. Here we are presenting finite element modelling and optimization of a free-free beam type mechanical resonato