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Electrical instability of thin films driven by Joule heating

✍ Scribed by C Pennetta; L Reggiani


Book ID
117626543
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
165 KB
Volume
20
Category
Article
ISSN
0927-0256

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## Abstract A modified crystallization process using current‐induced joule heating under vacuum is presented. A thin layer of high temperature resistant tungsten was sputtered on the amorphous silicon as the conducting and annealing medium. The thin film thickness was measured by α‐stepper. The hig