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Electrical Instability of RF Sputter Amorphous In-Ga-Zn-O Thin-Film Transistors

✍ Scribed by Tze-Ching Fung; Abe, K.; Kumomi, H.; Kanicki, J.


Book ID
115368663
Publisher
Institute of Electrical and Electronics Engineers
Year
2009
Tongue
English
Weight
817 KB
Volume
5
Category
Article
ISSN
1551-319X

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Sputter-deposited Ga-Sn-Zn-O thin films
✍ Kim, Dong-Ho ;Kim, Hey-Ri ;Kwon, Jung-Dae ;Lee, Gun-Hwan ;Lee, Hee Sung ;Im, Seo 📂 Article 📅 2011 🏛 John Wiley and Sons 🌐 English ⚖ 496 KB

## Abstract Ga–Sn–Zn–O (GTZO) thin films were prepared on glass substrates at 100 °C by co‐sputtering of Ga‐doped ZnO and SnO~2~ targets. Characteristic properties of the films were investigated with varying oxygen gas content in the sputtering ambient. Whereas amorphous GTZO films were prepared wi