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Electrical impedance spectroscopy of silicon surface states

✍ Scribed by Petr Viščor; Jan Vedde


Publisher
Elsevier Science
Year
1993
Weight
65 KB
Volume
287-288
Category
Article
ISSN
0167-2584

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📜 SIMILAR VOLUMES


Surface impedance of silicon substrates
✍ S. Gevorgian 📂 Article 📅 1998 🏛 John Wiley and Sons 🌐 English ⚖ 261 KB

It is shown that at microwave-millimeterwave frequencies and for DC resistivi-H ( ) I1 ties below s 2 f silicon should be regarded as a lossy metal characterized by 0 L resistivity, skin depth, and surface impedance, while at higher resistivities it may be ( ) regarded as a lossy dielectric charact