𝔖 Bobbio Scriptorium
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Electrical Contacts to Silicon Carbide

✍ Scribed by Hall, R. N.


Book ID
111909939
Publisher
American Institute of Physics
Year
1958
Tongue
English
Weight
565 KB
Volume
29
Category
Article
ISSN
0021-8979

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The interfacial reaction and phase formation as a function of the annealing temperature (600-10008C) and time were investigated on both titanium and nickel thin films evaporated on n-type 6H-SiC (0001) substrate. The study was carried out employing a combination of Rutherford backscattering spectrom