Electrical characterization of TiC ohmic contacts to aluminum ion implanted 4H–silicon carbide

✍ Scribed by Lee, S.-K.; Zetterling, C.-M.; Danielsson, E.; Ostling, M.; Palmquist, J.-P.; Hogberg, H.; Jansson, U.

• Book ID: 111935521
• Publisher: American Institute of Physics
• Year: 2000
• Tongue: English
• Weight: 289 KB
• Volume: 77
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.1290690