Electrical characterization of MIS capacitors fabricated from ECR-PECVD silicon oxide and silicon nitride bilayer films

✍ Scribed by H. Castán; S. Dueñas; J. Barbolla; E. San Andrés; A. Del Prado; I. Mártil; G. González-Díaz

• Book ID: 110442199
• Publisher: Springer US
• Year: 2003
• Tongue: English
• Weight: 735 KB
• Volume: 14
• Category: Article
• ISSN: 0957-4522
• DOI: 10.1023/a:1023907508286