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Electrical characterization of low temperature He-ion irradiated GaN

✍ Scribed by M Hayes; S.A Goodman; F.D Auret


Book ID
114170672
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
102 KB
Volume
148
Category
Article
ISSN
0168-583X

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Electrical characterization of H+ ion ir
✍ M. Hayes; F.D. Auret; P.J. Janse van Rensburg; J.M. Nel; W. Wesch; E. Wendler πŸ“‚ Article πŸ“… 2007 πŸ› Elsevier Science 🌐 English βš– 136 KB

Schottky barrier diodes (SBD's) were fabricated with 20/80/40/80 nm Ti/Al/Pt/Au ohmic contacts on the O face and circular 0.5 mm in diameter, 50 nm thick Ru Schottky contacts in the Zn face. Current (I) deep level transient spectroscopy (I-DLTS) was used to study the shallow level defects introduced