✦ LIBER ✦

Electrical characterization of integrated circuit metal line thickness

✍ Scribed by Santos Mayo; Harry A. Schafft

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 659 KB
Volume: 38
Category: Article
ISSN: 0038-1101
DOI: 10.1016/0038-1101(95)00080-d

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