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Electrical characterization of Cu-diffusion barriers using Schottky diodes

✍ Scribed by C. Ahrens; G. Friese; R. Ferretti; B. Schwierzi; W. Hasse

Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 380 KB
Volume: 33
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(96)00058-5

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