## Abstract We have investigated the electrical and structural properties of Pt/Ti metallization scheme on n‐type InP as a function of annealing temperature using current–voltage (__I__–__V__), capacitance–voltage (__C__–__V__), Auger electron spectroscopy (AES), and X‐ray diffraction (XRD) measure
✦ LIBER ✦
Electrical characterization of annealed Ti/TiN/Pt contacts on N-type 6H-SiC epilayer
✍ Scribed by Okojie, R.S.; Ned, A.A.; Kurtz, A.D.; Carr, W.N.
- Book ID
- 114537545
- Publisher
- IEEE
- Year
- 1999
- Tongue
- English
- Weight
- 438 KB
- Volume
- 46
- Category
- Article
- ISSN
- 0018-9383
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