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Electrical characteristics of silicon nanowire transistors fabricated by scanning probe and electron beam lithographies

✍ Scribed by Ryu, Yu Kyoung; Chiesa, Marco; Garcia, Ricardo

Book ID: 125857499
Publisher: Institute of Physics
Year: 2013
Tongue: English
Weight: 727 KB
Volume: 24
Category: Article
ISSN: 0957-4484
DOI: 10.1088/0957-4484/24/31/315205

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