Performance of 0.4-μm Linewidth SAW Interdigital Transducers Fabricated by Scanning-Electron-Beam Lithography

✍ Scribed by Temmyo, J.; Sakakibara, Y.; Komatsu, K.; Oda, M.; Yoshikawa, S.

• Book ID: 114597128
• Publisher: Institute of Electrical and Electronics Engineers
• Year: 1980
• Weight: 372 KB
• Volume: 27
• Category: Article
• ISSN: 0018-9537
• DOI: 10.1109/t-su.1980.31203