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Electrical characteristics of arc-free high-power pulsed sputtering glow plasma

✍ Scribed by K. Yukimura; R. Mieda; H. Tamagaki; T. Okimoto

Book ID
108278442
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
796 KB
Volume
202
Category
Article
ISSN
0257-8972

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✍ Yukimura, K. ;Mieda, R. ;Tamagaki, H. ;Okimoto, T. πŸ“‚ Article πŸ“… 2008 πŸ› John Wiley and Sons 🌐 English βš– 538 KB

## Abstract A droplet free metallic plasma source is promising for enhanced adhesion of films with a smooth coating surface. This paper concerns a highly ionized metallic plasma source using a pulsed Penning discharge. A high‐power pulsed sputtering (HPPS) glow discharge plasma is generated using e