Comparative study of high-power pulsed sputtering (HPPS) glow plasma techniques using Penning discharge and hollow-cathode discharge

✍ Scribed by Kingo Azuma; Ryosuke Mieda; Ken Yukimura; Hiroshi Tamagaki; Tadao Okimoto

• Book ID: 113919487
• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 770 KB
• Volume: 206
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/j.surfcoat.2011.04.027