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Voltage–current characteristics of a high-power pulsed sputtering (HPPS) glow discharge and plasma density estimation

✍ Scribed by Ken Yukimura; Ryosuke Mieda; Kingo Azuma; Hiroshi Tamagaki; Tadao Okimoto

Book ID
108224473
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
510 KB
Volume
267
Category
Article
ISSN
0168-583X

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