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Electrical characteristics and reliability of UV transparent Si3N4 metal-insulator-metal (MIM) capacitors

✍ Scribed by Bolam, R.J.; Ramachandran, V.; Coolbaugh, D.; Watson, K.M.

Book ID
114617055
Publisher
IEEE
Year
2003
Tongue
English
Weight
656 KB
Volume
50
Category
Article
ISSN
0018-9383

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