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Electrical behaviour of electron-beam-evaporated yttrium oxide thin films on silicon

โœ Scribed by R.N. Sharma; S.T. Lakshmikumar; A.C. Rastogi

Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
431 KB
Volume
199
Category
Article
ISSN
0040-6090

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## Abstract CdSe films have been deposited on glass substrates at different substrate temperatures between room temperature and 300 ยฐC. The films exhibited hexagonal structure with preferential orientation in the (002) direction. The crystallinity improved and the grain size increased with temperat