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Electrical and piezoresistive properties of boron-implanted ZMR-SOI films

✍ Scribed by P. Jeanjean; J. Sicart; J.L. Robert; D. Dutartre; V. Conedera

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
446 KB
Volume
36
Category
Article
ISSN
0924-4247

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The changes in the structural and electrical properties of nylon-6 Ðlms after implantation with an inert gas ion such as Ar`, with energy of 285 keV and at di †erent dose rates (1014 to 1017 ions cm~2), have been investigated. The conductivity, calculated using the projected range as the thickness o