Temperature dependence and non-uniformity of electrical properties of SOI films obtained by oxygen implantation

✍ Scribed by S. Cristoloveanu; J. Wyncoll; P. Spinelli; P.L.F. Hemment; R.P. Arrowsmith

• Publisher: Elsevier Science
• Year: 1985
• Weight: 299 KB
• Volume: 129
• Category: Article
• ISSN: 0378-4363
• DOI: 10.1016/0378-4363(85)90579-0