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Electrical and optical properties of Si-rich SiNx layers: Effect of annealing

✍ Scribed by P. Szöllősi; P. Basa; Cs. Dücső; B. Máté; M. Ádám; T. Lohner; P. Petrik; B. Pécz; L. Tóth; L. Dobos; L. Dózsa; Zs.J. Horváth

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