Structural and optical properties of a-S
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Aïssa Keffous; Abdelhak Cheriet; Youcef Belkacem; Noureddine Gabouze; Assia Bouk
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Article
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2010
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Elsevier Science
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English
⚖ 731 KB
Hydrogenated amorphous SiC films (a-Si 1-x C x :H) were prepared by dc magnetron sputtering technique on p-type Si(1 0 0) and corning 9075 substrates at low temperature, by using 32 sprigs of silicon carbide (6H-SiC). The deposited a-Si 1-x C x :H film was realized under a mixture of argon and hydro