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Electrical and optical properties of reactively evaporated indium tin oxide (ITO) films-dependence on substrate temperature and tin concentration

โœ Scribed by Balasubramanian, N; Subrahmanyam, A


Book ID
120440636
Publisher
Institute of Physics
Year
1989
Tongue
English
Weight
530 KB
Volume
22
Category
Article
ISSN
0022-3727

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Effect of substrate temperature on the e
โœ N. Balasubramanian; A. Subrahmanyam ๐Ÿ“‚ Article ๐Ÿ“… 1988 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 175 KB

Electrical and optical properties of indium tin oxide films coated on soda-lime glass substrates have been investigated as a function of substrate temperature (~ = 250-450 ยฐC). Highly conducting (p-~8xlO -4 ยฃ2 cm) and transparent (T-~90%) films have been obtained at a substrate temperature of 350 ยฐC