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Electrical and optical properties of F-doped textured SnO2 films deposited by APCVD

โœ Scribed by H.L. Ma; D.H. Zhang; S.Z. Win; S.Y. Li; Y.P. Chen


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
506 KB
Volume
40
Category
Article
ISSN
0927-0248

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P-type transparent conducting antimony-doped tin oxide (ATO) films were successfully fabricated on quartz glass substrates by radiofrequency magnetron sputtering using a 20 mol.% Sb-doped SnO 2 ceramic target. The deposited films were annealed at different temperatures for different durations. Hall