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96/05137 Electrical and optical properties of F-doped textured SnO2 films deposited by APCVD


Publisher
Elsevier Science
Year
1996
Weight
201 KB
Volume
37
Category
Article
ISSN
0140-6701

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Electrical, structural, photoluminescenc
โœ J. Ni; X. Zhao; X. Zheng; J. Zhao; B. Liu ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 683 KB

P-type transparent conducting antimony-doped tin oxide (ATO) films were successfully fabricated on quartz glass substrates by radiofrequency magnetron sputtering using a 20 mol.% Sb-doped SnO 2 ceramic target. The deposited films were annealed at different temperatures for different durations. Hall