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Electrical and optical characterization of Cd+ and P+ dually ion-implanted GaAs

โœ Scribed by H.L. Shen; X.H. Fang; D.S. Jiang; Y. Makita; S. Kimura; A. Obara; T. Shima; T. Iida; M. Kotani; N. Kobayashi

Book ID
114168837
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
409 KB
Volume
127-128
Category
Article
ISSN
0168-583X

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GaAs implanted with silicon and carbon:
GaAs implanted with silicon and carbon: electrical and optical characterization
โœ F. Abate; A. Castelli; E. Grilli; M. Guzzi; C. Severgninil ๐Ÿ“‚ Article ๐Ÿ“… 1995 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 644 KB

Semi-insulating GaAs samples co-implanted with silicon and carbon have been studied by electrical and optical measurements in order to evaluate the compensation level obtained with different post-implant thermal treatments. A triple implant of silicon at different energies and doses has been perform