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Optical and electrical properties of C+-implanted GaAs

โœ Scribed by Shigeru Shigetomi; Yunosuke Makita; Masahiko Mori; Yutaka Koga; Paul Phelan; Nobukazu Ohnishi; Hajime Shibata; Tokue Matsumori


Book ID
113280215
Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
383 KB
Volume
39
Category
Article
ISSN
0168-583X

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๐Ÿ“œ SIMILAR VOLUMES


GaAs implanted with silicon and carbon:
โœ F. Abate; A. Castelli; E. Grilli; M. Guzzi; C. Severgninil ๐Ÿ“‚ Article ๐Ÿ“… 1995 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 644 KB

Semi-insulating GaAs samples co-implanted with silicon and carbon have been studied by electrical and optical measurements in order to evaluate the compensation level obtained with different post-implant thermal treatments. A triple implant of silicon at different energies and doses has been perform