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Electrical and optical characteristics of Co-sputtered amorphous Ce-doped indium-zinc-oxide thin-film transistors

✍ Scribed by Ja Hyun Koo, Tae Sung Kang, Tae Yoon Kim…

Book ID
120798546
Publisher
The Korean Physical Society
Year
2013
Tongue
English
Weight
217 KB
Volume
62
Category
Article
ISSN
0374-4884

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Effect of oxygen partial pressure on optical and electrical properties of co-sputtered amorphous zinc indium tin oxide thin films
✍ Saji, K. J. ;Jayaraj, M. K. 📂 Article 📅 2008 🏛 John Wiley and Sons 🌐 English ⚖ 298 KB

## Abstract Transparent thin films of amorphous zinc indium tin oxide were prepared at room temperature by co‐sputtering of zinc oxide and indium tin oxide. Effect of oxygen partial pressure on the optical and electrical properties of amorphous zinc indium tin oxide thin films were investigated. Co