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Structural and electrical properties of sputtered indium–zinc oxide thin films

✍ Scribed by D.Y. Ku; I.H. Kim; I. Lee; K.S. Lee; T.S. Lee; J.-h. Jeong; B. Cheong; Y.-J. Baik; W.M. Kim


Book ID
108289372
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
449 KB
Volume
515
Category
Article
ISSN
0040-6090

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Effect of oxygen partial pressure on opt
✍ Saji, K. J. ;Jayaraj, M. K. 📂 Article 📅 2008 🏛 John Wiley and Sons 🌐 English ⚖ 298 KB

## Abstract Transparent thin films of amorphous zinc indium tin oxide were prepared at room temperature by co‐sputtering of zinc oxide and indium tin oxide. Effect of oxygen partial pressure on the optical and electrical properties of amorphous zinc indium tin oxide thin films were investigated. Co