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Electrical properties of zinc oxide sputtered thin films

✍ Scribed by R. Ondo-Ndong; G. Ferblantier; F. Pascal-Delannoy; A. Boyer; A. Foucaran

Book ID
108360913
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
170 KB
Volume
34
Category
Article
ISSN
0026-2692

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Effect of oxygen partial pressure on opt
Effect of oxygen partial pressure on optical and electrical properties of co-sputtered amorphous zinc indium tin oxide thin films
✍ Saji, K. J. ;Jayaraj, M. K. πŸ“‚ Article πŸ“… 2008 πŸ› John Wiley and Sons 🌐 English βš– 298 KB

## Abstract Transparent thin films of amorphous zinc indium tin oxide were prepared at room temperature by co‐sputtering of zinc oxide and indium tin oxide. Effect of oxygen partial pressure on the optical and electrical properties of amorphous zinc indium tin oxide thin films were investigated. Co