Interface properties of an AlN/(AlN)x(Si
✍
Edgar, J. H. ;Gu, Z. ;Gu, L. ;Smith, David J.
📂
Article
📅
2006
🏛
John Wiley and Sons
🌐
English
⚖ 332 KB
## Abstract The crystal structure and compositional changes near the two interfaces of a AlN/(AlN)__~x~__ (SiC)~1–__x__~ /4H‐SiC heterostructure prepared by sublimation‐recondensation growth were examined by cross‐sectional transmission electron microscopy. Deposition of an (AlN)__~x~__ (SiC)~1–__x