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Elastic modulus and structural evolution of diamond-like carbon films deposited by RF-PACVD

โœ Scribed by Chung, Jin-Won; Ko, Dae-Hong; Eun, Kwang Yong; Lee, Kwang-Ryeol


Book ID
122786087
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
252 KB
Volume
11
Category
Article
ISSN
0925-9635

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