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Effects of thermal annealing on the structural properties of sputtered W–Si–N diffusion barriers

✍ Scribed by Alberto Vomiero; Enrico Boscolo Marchi; Stefano Frabboni; Alberto Quaranta; Gianantonio Della Mea; Gino Mariotto; Laura Felisari; Mariangela Butturi

Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
411 KB
Volume
7
Category
Article
ISSN
1369-8001

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